Pulvérisation magnétron radiofréquence Rare-earth ions Photovoltaic XRD SiC Matériaux hybrides Nanostructure Nanoparticles Atom probe tomography Silicon Cathodoluminescence Oxygen vacancies Radiofrequency magnetron sputtering Friction Hafnium silicates GENOMIQUE Hillocks Semiconductors Down-conversion Fluorescence Neodymium Rare-earth- doped materials Photoluminescence Phase transition Films Luminescence Nanostructures Couches minces Rare earths Lifetime Structural properties Citric acid Electroluminescence Guide d'onde Pulvérisation cathodique Nanoparticules Nanostructuring Magnetron sputtering Computational electromagnetic methods Microstructure Si nanocluster High-k dielectrics Silicium Hafnium silicate Oxides Si-rich silicon oxide Silicon nanoclusters M-lines Oxide interface Thin film MoS2 Microstructure physique Raman Refractive index Optical amplifiers AFM Silicon nanocrystals Rare-earth Conductivity Quantum-well Energy transfer Erbium Silicon nitride PZT Electron paramagnetic resonance Waveguides Sputtering Microstructure physics Couches minces semi-conductrices Rare earth Cerium Waveguide Raman scattering Thin films CoMoS Al2O3 Crystal structure Resistive Switching Epitaxy Feature erasure CO adsorption Terres rares ADE-FDTD Irradiation Grazing incidence X-ray diffraction Doping FTIR IR spectroscopy Terbium Rare-earth-doped materials Multilayers Infrared absorption Silicon photonics Oxide materials Nanostructured materials HR STEM-HAADF Liposomes RF magnetron sputtering Reactive magnetron sputtering Laser pyrolysis